Microsystems need sensor and actuator capabilitiesto have meaningful interaction with their environment. There are a whole series of physical effects and materials available for converting mechanical, thermal, optical or chemical signals into electrical impulses, although their performance has to be brought in line with the intended purpose. 

»Smart materials«, among them piezoelectrics that can take on both sensor and actuator functions, are particularly interesting since they are available in a wide range of forms such as thin films, thick films, mono-crystal wafers or fibers for microelectromechanical systems (MEMS). This list should also include new electroactive polymers (EAP) for actuator applications. 

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